A highly ordered nanoporous NiTi oxide layers were fabricated on Ti alloys with high Ni contents (50.6 at.%) by a combination of self-organizing anodization at 0°C and subsequent selective etching in H2O2. The key for successful formation of such layers is to sufficiently suppress the dissolve of NiO by applying lower temperature during anodization. The resulting nanoporous structure is connect...

A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct p...

This work reports the coating of porous silicon (PS) with LaF3 and its influence on the photoluminescence (PL) property of PS. PS samples, prepared by electrochemical etching in a solution of HF and ethanol, were coated with e-beam evaporated-LaF3 of different thicknesses. It was observed that the thin LaF3 layer on PS led to a good enhancement of PL yield of PS. But with the increasing thickne...

: A process chain for a magnetoelectric device based on porous InP will be presented using only chemical, electrochemical, photoelectrochemical, photochemical treatments and the galvanic deposition of metals in high-aspect-ratio structures. All relevant process steps starting with the formation of a self-ordered array of current-line oriented pores followed by the membrane fabrication and a pos...

We describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This technique is of a particular interest for bit-patterned magnetic recording medium fabrication, where ...

The design of a combined scanning electrochemical microscope-quartz crystal microbalance (SECM-QCM) with separate potential control of the tip and substrate is described. Both lateral and vertical tip movements near the substrate affect the QCM resonant frequency because of perturbations of the longitudinal and shear waves of the quartz crystal (QC) acoustic wave sensor. The SECM-QCM was used t...

Three-dimensional Li ion microbatteries are known for their high surface area which leads to high current and capacity compared to traditional planar batteries. This paper describes economical approaches to prepare half 3D microbatteries based on silicon microchannel plates (MCP). The high aspect ratio silicon MCP is formed by electrochemical etching and a nickel layer is coated onto the silico...

Quite recently, ion-track membranes of poly(vinylidene fluoride) (PVDF) have attracted a renewed interest for their applications to next-generation electrochemical devices such as fuel cells [1,2]. In order to produce tracketched pores in PVDF films, several kinds of etching solutions were previously employed. In most cases [3], a highly concentrated aqueous KOH solution with a KMnO4 additive w...

The method of modified metal-assisted electrochemical etching was proposed and arrays nanostructured porous silicon wires on n-type monocrystalline substrate with crystallographic orientation (111) were obtained. influence the electrolyte composition at second stage obtaining morphology by scanning electron microscopy methods revealed. phase controlled Raman spectroscopy. Keywords: Porous silic...