In this paper, a model for MEMS capacitive microphone is presented for integrated circuits.  The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...

We describe an In-Cell Projected Capacitive Touch Panel in a display using IGZO TFT technology. The prototype demonstrates high signal-to-noise ratio (SNR) and pen input operation. The possibility of enlarging the display size beyond current limits makes this a highly promising approach for In-Cell Capacitive touch panels. key words: in-cell touch panel, pen input, high SNR, projected capacitance

In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...

natural vibration analysis of plates represents an important issue in engineering applications. in this paper, a new and simplify method for vibration analysis of circular and rectangular plates is presented. the design of an effective robust controller, which consistently attenuates transverse vibration of the plate caused by an external disturbance force, is given. the dynamics of the plate i...

The possibility of reliable, reasonably accurate and relatively inexpensive estimates of sensible heat and latent energy fluxes was investigated using a commercial combination thin-film polymer capacitive relative humidity and adjacent temperature sensor instrument. Long-term and unattended water vapour pressure profile difference measurements using low-power combination instruments were compar...

Capacitive deionization (CDI) is a promising desalination technology based on electrosorption the surfaces of microporous electrodes. However, low total dissolved solids (TDS) in water restricts its efficacy. In this work, we develop theory capacitive spacers (CS) CDI. The investigations reveal mechanism that call ohmic charging; is, resistive losses spacer region drive adsorption CS. As conseq...

In this work, we model a radiofrequency discharge of hydrogenated silicon nitride in a capacitive coupled plasma reactor using Maxwellian and non-Maxwellian electron energy distribution function. The purpose is to investigate whether there is a real advantage and a significant contribution using non-Maxwellian electron energy distribution function rather than Maxwellian one for determining the ...