High dielectric capacitor, that has around 1000 in dielectric constant, can be successfully formed by nanotransfer on non-heat-resisting substrates. PZT film could be released from the Si substrate and bonded onto the polymer one. The releasing characteristics have the relationships with the thickness of Pt layer. The formed PZT has perovskite structure and clear columnar texture.

In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.

Electrode stability, interdiffusion, phase purity and deviation from stoichiometry at the PZT-electrode interface are key issues in PZT thin film integration. This article highlights the use of transmission electron imaging combined with energy dispersive spectroscopy (EDS) for the investigation of these phenomena. The accuracy of the EDS analysis is discussed. It will be shown that using a sta...

This paper reports lead zirconate tit silicon electromechanical resonators wit terminated, performances for RF appl 2.14 dB insertion loss is demonstrat extensional, PZT-on-2-μm-silicon 15 M 22 dB return loss and maximum unload QUL,max, of ~540 in air resulted for this r performances with a QUL,max of demonstrated with a PZT fabricated device. The competing effects of de resistance and increase...

In various industries such as power plants, ultrasonic non-destructive testing (NDT) is widely used because of cost effectiveness and sub-surface defect/flaw detection capability. Piezoelectric films made of sol-gel composites could be useful as ultrasonic transducers due to high tempearature durability, reasonable signal strength, curved surface suitability, relatively low center frequency suc...

This paper reports the feasibility of biopsy needle tract cauterization and cauterization monitoring using an embedded array of piezoceramic microheaters. Circular heaters of lead zirconate titanate (PZT-5A), with 200 μm diameter and 70-80 μm thickness, are fabricated using a batch mode micro ultrasonic machining process. These are then assembled into cavities in the walls of 20-gauge stainless...

In this study, new impedance measurement techniques are developed specially for structural health monitoring of large-scale structures. Electromechanical (EM) impedance based damage detection techniques, which utilize the electromechanical coupling effect between a piezoelectric transducer such as lead zirconate titanate (PZT) and a host structure, have been shown to be very sensitive to local ...