Abstract Microelectromechanical system (MEMS) has been highly valued since the size of MEMS structure is miniaturized, spacing between components in nanometer range, and behaviors friction adhesion greatly affect reliability MEMS. An atomic force microscope (AFM) was used to observe surface morphology carbon nanotube (CNT)/polymethyl methacrylate (PMMA) film, X-ray photoelectron spectroscopy (X...

New technologies based on micro-technology, so called MEMS (Micro ElectroMechanical Systems), have been enabling many new products over the last ten years such as inkjet printers, displays or pressure sensors. Focusing on measurement of motion, MEMS inertial sensors such as accelerometers and gyroscopes, open new application fi elds for three big branches: Testing of MEMS based Inertial Sensors...

Current disk arrays, the basic building blocks of highperformance storage systems, are built around two memory technologies: magnetic disk drives, and non-volatile DRAM caches. Disk latencies are higher by six orders of magnitude than non-volatile DRAM access times, but cache costs over 1000 times more per byte. A new storage technology based on microelectromechanical systems (MEMS) will soon o...

Evolutionary Synthesis of MEMS by Raffi Roupen Kamalian Doctor of Philosophy in Engineering Mechanical Engineering University of California, Berkeley Professor Alice M. Agogino, Chair An evolutionary synthesis framework for Microelectrical Mechanical System (MEMS) design is presented. MEMS based technologies promise to bring a revolution to the world we live in just as the integrated circuit ha...

To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector ...

For decades the RAM-to-disk memory hierarchy gap has plagued computer architects. An exciting new storage technology based on microelectromechanical systems (MEMS) is poised to ll a large portion of this performance gap, signi cantly reduce system power consumption, and enable many new applications. This paper explores the system-level implications of integrating MEMS-based storage into the mem...

MEMS processes and components are rapidly changing in device design, processing, and, most importantly, application. This paper will discuss the future challenges faced by the MEMS failure analysis as the field of MEMS (fabrication, component design, and applications) grows. Specific areas of concern for the failure analyst will also be discussed.

Micro-electro-mechanical systems or MEMS are used in a variety of today’s technology and can be modeled using equations for nonlinear damped harmonic oscillators. Mathematical expressions have been formulated to determine resonance frequency shifts as a result of hardening and softening effects in MEMS devices. In this work we experimentally test the previous theoretical analysis of MEMS resona...

this paper presents a wide band RF MEMS VCO operating at 10 GHz. The designed VCO is based on high performances RF MEMS solenoid inductor. We have used HFSS software for design and analysis of different RF MEMS solenoid inductors. Best performances are obtained using SU8 dielectric substrate and copper coil: Qmax= 60.9, L = 2.6 nH at 10 GHz, and SRF= 20.8 GHz. Moreover, we have investigated the...

We describe a wireless system for actuating and detecting the motion of MHz-frequency, low dissipation MEMS resonators. The overall system is essentially a custom-designed RFID-like system, with the tags based upon unique MEMS chips as opposed to conventional RFID chips. The MEMS devices are vacuum encapsulated, rugged, CMOS-compatible, and are approximately 1mm-by-1mm-by-0.5mm. The system is p...