this article describes an accurate subpico flowmeter bifurcatedin to liquid and gas flowrates less than 1mol/s for both mems/nems and cryogenic technology applications. the mems/nems are described as either two gauges (instrument), or quartz fluctuating forks, even if the liquid or gas flows through an element, as well as cryogenic technology consisting of arrays of either parallel photonic cry...

MEMS (micro-electro-mechanical-systems) device has been a promising and fascinating topic in both mechanical and electrical engineering domains for decades with the revolutionary contributions to the contemporary micro-scale instruments especially for the micro-actuator and micro-sensor. Among the versatile material foundation to build up the MEMS device, silicon wafer is preferred to due to th...

Metamaterials, materials that are constructed with arrays of small elements have significant potential to provide material properties that are useful for electromagnetic applications but are not found in nature. Slight changes to a repeated unit cell can be used to tune the effective bulk material properties of a metamaterial, replacing the need to discover suitable materials for an application...

Problem statement: In this study Microelectrical Mechanical System (MEMS) switches were proposed to design a reconfigurable/multi-band antenna to replaced PIN diode switches or semiconductor switches due to lower insertion losses, good isolation, much lower intermodulation distortion, and lower power consumption. The antenna is able to operate at very high frequencies. Approach: A reconfigurabl...

With their extremely low mass and volume, low power consumption and tight integration with electronics, MEMS (microsystems) sensors and actuators are extremely appealing for reducing the size and mass of spacecraft without sacrificing functionality. In view of the harsh and remote environment of space, reliability and qualification is the crucial issues that are holding back MEMS from playing a...

Having now produced devices with sufficient Q, thermal stability, aging stability, and manufacturability, vibrating RF MEMS technology is already finding its way into next generation timing and wireless applications. At this juncture, the technology is now poised to take its next logical steps: higher levels of circuit complexity and integration. In particular, as vibrating RF MEMS devices are ...

MEMS Oscillator design for high frequency application is approached in this project and its gain, noise and power are analyzed. The CMOS Micro Electro Mechanical System resonator structure is modeled using its RLC equivalent circuit where all passive components are extracted by COMSOL Mutiphysics tool. MEMS based oscillator requires to be combined with amplifier circuits to improve the performa...