While computer modeling of MEMS systems is becoming increasingly sophisticated, the delicacy and complexity of many MEMS components requires accurate metrology of the final devices to assure proper performance. Stiction, motion versus drive signal, shape changes during actuation, angular repeatability, and resonant frequencies are all items of interest. By obtaining topographic information as t...

Fault detection and diagnosis is critical for maintaining the health of process systems. Common fault signals include process and disturbance parameter changes, as well as sensor and actuator malfunctions (such as persistent drifts and biases). These may be characterized by the existence of latent ‘fault’ states. This work examines the effectiveness of a Hidden Markov Model framework for modeli...

In silicon surface micromachining, anhydrous HF GPE process was verified as a very effective method for the dry release of microstructures. The developed gas-phase etching (GPE) process with anhydrous hydrogen fluoride (HF) gas and alcoholic vapor such as methanol, isopropyl alcohol (IPA) was characterized and its selective etching properties were discussed. The structural layers are P-doped mu...

Oscillations in the control loops indicate poor performance of loops. The occurrence oscillations process loop is quite high industry, so it needs to be reduced that can work properly. first step for oscillation reduction detection. One type difficult detect intermittent oscillation. smart factory concept encourages development detection system using machine learning by being implemented online...

In this article, we present a convex formulation of compliant frictional contact and robust performant method to solve it in practice. By analytically eliminating constraints, obtain an unconstrained problem. Our solver has proven global convergence warm-starts effectively, enabling simulation at interactive rates. We develop compact analytical expressions forces allowing us describe our model ...

Abstract The Casimir force, a quantum mechanical effect, has been observed in several microelectromechanical system (MEMS) platforms. Due to its extreme sensitivity the separation of two objects, force proposed as an excellent avenue for metrology. Practical application, however, is challenging due attractive forces leading stiction and device failure, called pull-in. In this work, we design si...