We demonstrate optical microresonators in polycrystalline silicon with quality factors of 20,000. We also demonstrate polycrystalline resonators vertically coupled to crystalline silicon waveguides. Electrically active photonic structures fabricated in deposited polysilicon layers would enable the large-scale integration of photonics with current CMOS microelectronics.

In dual workfunction gate technologies it can be observed, that p+ poly gates of pMOSFETs tend to lose boron doping. This work presents a model for the transport of Si and B in the TiSi~/polysilicon bilayer system that can explain the saturation of the B dose loss.

This paper presents results of a systematic investigation to characterize the sealing of micromachined cavities using chemical vapor deposition (CVD) methods. We have designed and fabricated a large number and variety of surface-micromachined test structures with different etch-channel dimensions. Each cavity is then subjected to a number of sequential CVD deposition steps with incremental thic...

Low frequency (LF) noise is a powerful and nondestructive technique for evaluating the oxide-semiconductor interface an effective tool in characterizing electronic device’s structure reliability. In this study, we present systematic analysis of striking abnormal 1/f behavior hot carrier induced defects highspeed polysilicon emitter bipolar transistors (PE-BJTs) SiGe HBTs. Here, comparative resu...