نتایج جستجو برای: pecvd reactor

تعداد نتایج: 30231  

Journal: :Ceramics International 2021

Diamond-like carbon (DLC) coatings are recognized for a broad range of industrial applications due to their superior mechanical properties such as high hardness, low friction, and promising wear resistance. DLC commonly produced with physical vapour deposition (PVD) plasma-enhanced chemical (PECVD) methods. New markets emerging in electronics, biomedical, additive manufacturing textiles sectors...

2013
J. Huran

The influence of diamond like carbon films properties on quantum efficiency of prepared transmission photocathodes has been investigated. DLC films were deposited on silicon substrate and stainless steel mesh by PECVD using methane, argon and hydrogen or deuterium gas mixtures. Photocathodes prepared with deuterated DLC film have higher quantum efficiency than photocathodes prepared with hydrog...

Journal: :Chemical communications 2012
Donna J Menzies Thomas Gengenbach John S Forsythe Nick Birbilis Graham Johnson Christine Charles Gail McFarland Richard J Williams Celesta Fong Patrick Leech Keith McLean Benjamin W Muir

Micropatterning of surfaces with varying chemical, physical and topographical properties usually requires a number of fabrication steps. Herein, we describe a micropatterning technique based on plasma enhanced chemical vapour deposition (PECVD) that deposits both protein resistant and protein repellent surface chemistries in a single step. The resulting multifunctional, selective surface chemis...

Journal: :Optics express 2011
Nicolás Sherwood-Droz Michal Lipson

We experimentally show vertically stacked, multi-layer, low-temperature deposited photonics for integration on processed microelectronics. Waveguides, microrings, and crossings are fabricated out of 400°C PECVD Si3N4 and SiO2 in a two layer configuration. Waveguide losses of ~1 dB/cm in the L-band are demonstrated using standard processing and without post-deposition annealing, along with verti...

2006
A. E. Ghaly

In this study, the effectiveness of two conventional UV reactors in series for the online sterilization of cheese whey was compared to that of a single conventional reactor. The single reactor and the two reactor series were tested at eleven flow rates (5, 10, 15, 20, 25, 30, 35, 40, 50, 60 and 70 mL min ) and five flow rates, (35, 40, 50, 60, 70 mL min ), respectively. 100% destruction efficie...

2005
M. Hutnan M. Drtil J. Derco L. Mrafkova

Due to its structure, hexamethylenetetramine (HMT) is a slowly biodegradable substance, hydrolysing in acid environment to ammonium and formaldehyde. Formaldehyde is toxic under normal conditions for biological treatment processes. Following an adaptation, a formaldehyde concentration of 1000 mg·l may become biodegradable both in aerobic and anaerobic conditions. Acidic conditions for hydrolysi...

2001
R. J. WIJNGAARDEN

Pellet heat and mass transfer coefficients inside packed beds do not have definite deterministic values, but are stochastic quantities with a certain distribution. Here, a method is presented to incorporate the stochastic distribution of pellet properties in reactor design and operation models. The theory presented is illustrated with a number of examples. It is shown that pellet-scale statisti...

Journal: :Brazilian Journal of Physics 2002

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