INFORMATIVENESS AND THE COMPUTATIONAL METROLOGY OF COLLABORATIVE ADAPTIVE SENSOR SYSTEMS

Entanglement is at the heart of quantum technologies such as quantum information and quantum metrology. Providing larger quantum Fisher information (QFI), entangled systems can be better resources than separable systems in quantum metrology. QFI topic is a very active research area and it has many possible usage areas in quantum information domain. In this study, we review quantum Fisher inform...

We report on the measurement of the fringe-to-substrate phase error in our Nanoruler system. This system utilizes scanning beam interference lithography to pattern and measure large-area, nanometer-accuracy gratings that are appropriate for semiconductor and integrated opto-electronic metrology. We present the Nanonruler’s metrology system that is based on digital frequency synthesizers, acoust...

Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications by Jae Yeon Baek Doctor of Philosophy in Engineering – Electrical Engineering and Computer Sciences University of California, Berkeley Professor Costas J. Spanos, Chair The semiconductor manufacturing industry currently faces many challenges in terms of metrology and process control. With the delay of EUV and the a...

With the rapid and continuous development of nanomanufacturing technology, demands for both large range high precision metrology structured surfaces are becoming increasingly urgent. This paper proposes a metrological measurement system based on commercial atomic force microscope. By using nano-positioning platform from SIOS, expands 110 μm × 20 to 25 mm 5 mm. A signal amplifier with low noise ...

A modified diamond–photonics based metrology is proposed to explore the magnetic fields created by agglomerates of nanoparticles (MNPs). MNPs are promising for environmental and medical applications; those cancer hyperthermia treatments small superparamagnetic <20 nm iron oxide particles. Inside cells, they assemble in larger MNP agglomerates, reaching cross-sections several micrometers. Here, ...

A new kind of parallel mechanism machine called the CGT (Cartesian-Guided Tripod) for three-axis machining, CGP (Cartesian-Guided Pentapod) for five-axis machining, and CGH (Cartesian-Guided Hexapod) for six-axis positioning is presented on this paper. The CGT/CGP/CGH has two kinds of functional independent legs: the driving functional leg and the integrated Cartesian guiding/metrology function...

In contrast to the widely used mean-line based evaluation techniques, the capabilities of morphological methods are not fully recognized in practice. Morphological operations, e.g. dilation, erosion, closing and opening, are useful tools in surface metrology and dimensional metrology. This paper presents a variety of novel applications of morphological operations in association with several of ...

147 The Evaluation of Expanded Uncertainty of Measurement Results in Direct Measurements Using the LabVIEW Environment P. Otomański, A. Szlachta Institute of Electrical Engineering and Electronics, Division of Metrology and Optoelectronics, Poznan University of Technology, Piotrowo street 3a, 60 – 965 Poznan, Poland, e-mail: [email protected] Department of Metrology and Measurement System...