This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

In this paper, new topology of phase shifter is proposed that uses advantage of metamaterial and MEMS technology. The phase shifter is switched between two states of RH- and LH-TL having frequency passband unlike other proposed metamaterials which create the maximum phase shift from one unitcell. Analysis and design approach of the phase shifter is presented and the structure is simulated using...

In this paper we develop a numerical procedure using finite element and augmented Lagrangian meth-ods that simulates electro-mechanical pull-in states of both cantilever and fixed beams in microelectromechanical systems (MEMS) switches. We devise the augmented Lagrangian methods for the well-known Euler-Bernoulli beam equation which also takes into consideration of the fringing effect of electr...

Lifetime and reliability in realistic operating conditions are important parameters for the application of thin-film piezoelectric microelectromechanical systems (piezoMEMS) based on lead zirconate titanate (PZT). Humidity can induce time-dependent dielectric breakdown at a higher rate compared to dry conditions, significantly alter dynamic behavior piezoMEMS-devices. Here we assess lifetime PZ...