Micro-electro-mechanical systems or MEMS are used in a variety of today’s technology and can be modeled using equations for nonlinear damped harmonic oscillators. Mathematical expressions have been formulated to determine resonance frequency shifts as a result of hardening and softening effects in MEMS devices. In this work we experimentally test the previous theoretical analysis of MEMS resona...

The frustule of diatoms, unicellular microalgae, shows very interesting photonic features, generally related to its complicated and quasi-periodic micro- and nano-structure. In order to simulate light propagation inside and through this natural structure, it is important to develop three-dimensional (3D) models for synthetic replica with high spatial resolution. In this paper, we present a new ...

This paper presents an approach to evaluate capacitance developed by perforated membrane of RF MEMS switch with high accuracy. An analytical model is for both upstate and downstate including parasitic fringing field in parallel plate model. The proposed includes the ligament efficiency term directly formula which reduce efforts calculate it individually various perforation sizes. analysis has b...

Silicon dioxide and silicon nitride as well as other insulating materials are used in micro-electro-mechanical systems. However, their tendency for electrostatic charging diminishes the device reliability. The charging effect becomes significant when these devices are subjected to ionizing radiation. The irradiation induced charging depends on the nature of irradiation, the underlying metal lay...

This work presents a novel method based on the micromachined acoustic wave sensor for evaluating silicon membrane thickness. Like pressure sensors, accelerometers, micro flow sensors and micropumps, many micro-electro-mechanical systems (MEMS) devices require that silicon membrane thickness be known exactly. Precisely controlling silicon membrane thickness during wet etching is important, becau...

The well-known electro-mechanical analogy that equates current, voltage, resistance, inductance and capacitance to force, velocity, damping, spring constant and mass has a shortcoming in that mass can only be used to simulate a capacitor which has one terminal connected to ground. A new model that was previously proposed by the authors that combines a mass with a pulley (MP) is shown to simulat...