The material removal rate (MRR) plays a critical role in the chemical mechanical planarization (CMP) process semiconductor industry. Many physics-based and data-driven approaches have been proposed to-date to predict MRR. Nevertheless, most of them neglect underlying equipment structure containing essential interaction mechanisms among different components. To fill gap, this paper proposes nove...

in recent year, the evolutionary structural optimization (eso) method, has been applied as an effective tool for structures design. the concept of eso method is to use the finite element  results in each iteration of process and removal of inefficient material based on these results. in this method there are several experimental parameters such as rejection rate and evolutionary rate that are e...

The emergence of ultrasonic vibration–assisted polishing technology has effectively improved the machining accuracy and efficiency hard brittle materials in modern optical industry; however, material removal mechanism (UVAP) still needs to be further revealed. This paper focuses on glass (BK7), application axial vibration, atomization slurry; model was established. Based analysis relationship b...

In the current research, neuro-fuzzy model and regression model was developed to predict Material Removal Rate in Electrical Discharge Machining process for AISI D2 tool steel with copper electrode. Extensive experiments were conducted with various levels of discharge current, pulse duration and duty cycle. The experimental data are split into two sets, one for training and the other for valida...

To achieve the optimal control of material removal rate (MRR) for a machining project, a Dynamic Machining Project Control (DMPC) Model is proposed under the considerations of order quantity and deadline constraints. This paper not only introduces material removal rate into the objective function dynamically, but also implements Calculus of Variations to resolve the continuous control problem c...