We report on the oxidation behavior of AlN/CrN multilayers at 900 °C, deposited by radio frequency magnetron sputtering. It is shown that oxidation in this system is controlled by diffusion of Cr towards the surface and formation of Cr2O3. Cr diffusion is found to mainly occur along grain boundaries. Thus, coherent cubic AlN/CrN multilayer regions with coarse columnar grain structures are found...

by magnetron sputtering W. G. Wang, K. J. Han, K. J. Yee, C. Ni, Q. Wen, H. W. Zhang, Y. Zhang, L. Shah, and John Q. Xiao Department of Physics and Astronomy, University of Delaware, Newark, Delaware 19716, USA Department of Physics, Chungnam National University, Daejeon 305-764, Republic of Korea Department of Materials Sciences, University of Delaware, Newark, Delaware 19716, USA University o...

SiNx and SiCxNy coatings were fabricated with high power impulse magnetron sputtering (HiPIMS). The coatings microstructure, growth pattern, surface morphology, composition, and bonding structure were investigated by AFM, SEM, GIXRD, TEM, EDS as well as XPS, and related to the deposition parameters target powers and substrate temperature. Crosssections of SiCxNy coatings showed either dense and...

Andrejs Petruhins, Arni Sigurdur Ingason, Martin Dahlqvist, Aurelija Mockuté, Muhammad Junaid, Jens Birch, Jun Lu, Lars Hultman, Per O A Persson and Johanna Rosén, Phase stability of Crn+1GaCn MAX phases from first principles and Cr2GaC thin-film synthesis using magnetron sputtering from elemental targets, 2013, Physica Status Solidi. Rapid Research Letters, (7), 11, 971-974. http://dx.doi.org/...

Thin film coatings are used to reduce the generation of secondary electrons at the ends of the Advanced Photon Source (APS) rf cavity tuners because these electrons result in increased temperatures on the tuner. To improve the film properties over the existing evaporated titanium film, a magnetron-sputtered film of titanium nitride has been developed that is both harder and adheres more strongl...

The use of carbon nanotubes as tips in atomic force microscopy for a systematic study of dry etching pattern transfer in GaAs is described. The GaAs samples are patterned via electron beam lithography and then etched using magnetron reactive ion or chemically assisted ion beam processing. The technique allows diagnosis, in air, of etched features with scale sizes of ,100 nm. © 1998 American Ins...

Photocatalytic antibacterial sol-gel coated substrates have been reported to kill bacteria under light or in the dark. These coatings showed non-uniform distribution, poor adhesion to the substrate and short effective lifetime as antibacterial surfaces. These serious limitations to the performance/stability retard the potential application of antibacterial films on a wide range of surfaces in h...

Niobium thin film cavities have shown good and reliable performance for LEP and LHC, although there are limitations to overcome if this technique should be used for new accelerators such as the ILC. New coating techniques like High Power Impulse Magnetron Sputtering (HiPIMS) has shown very promising results and we will report on its possible improvements for Nb thin film cavity performance. Cur...

We report on the transition between two regimes from several-atom clusters to much larger nanoparticles in Ar magnetron sputter deposition of WSi2, and the effect of nanoparticles on the properties of amorphous thin films and multilayers. Sputter deposition of thin films is monitored by in situ x-ray scattering, including x-ray reflectivity and grazing incidence small-angle x-ray scattering. Th...