Abstract - This paper presents a new design of microwave microelectromechanical systems (MEMS) phase shifter for dual band wireless local area network (WLAN) applications. A bit is designed which product a constant phase shift of 11.25° by switching between two line that consist of 12 and 6 unitcells in each frequency band. A unitcell is constructed by gold membrane suspended over the coplanar ...

Electrostatically actuated microbeams have been studied by many researchers in the last few years. The aim of this study is to present an improved numerical analysis of the dynamic instability of a cantilever microbeam immersed in an incompressible viscous fluid. The finite element method is used for solving the vibrational equation of the microbeam and the potential functions of the fluids in ...

This paper addresses the static and dynamic stabilities of a parametrically excited torsional micro-actuator. The system is composed of a rectangular micro-mirror symmetrically suspended between two electrodes and acted upon by a steady (dc ) while simultaneously superimposed to an (ac ) voltage. First, the stability of the system subjected to a quasi-statically applied (dc ) voltage is investi...

Thermoelastic damping (TED) in a circular micro-plate resonator subjected to an electrostatic pressure is studied. The coupled thermo-elastic equations of a capacitive circular micro plate are derived considering hyperbolic heat conduction model and solved by applying Galerkin discretization method. Applying complex-frequency approach to the coupled thermo-elastic equations, TED is obtained for...

Dielectric elastomer actuators (DEAs) are a promising soft actuator technology for robotics. Adding robotic functionalities—folding, variable stiffness, and adhesion—into their actuator design is a novel method to create functionalized robots with simplified actuator configurations. We first propose a foldable actuator that has a simple antagonistic DEA configuration allowing bidirectional actu...

Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became widely used large-volume products today. However, due to reliability-related issues inherent limitations, the pull-in instability extremely small st...

By controlling the degrees of freedom for the components in the system and using a PWL solver, a tradeoff between speed and accuracy is realized. Electrical components are modeled using a similar MNA technique. The interaction between electrical and mechanical components is accomplished by modeling the coupled energy between the domains. In this paper we demonstrate the capabilities of our syst...

By controlling the degrees of freedom for the components in the system and using a PWL solver, a tradeoff between speed and accuracy is realized. Electrical components are modeled using a similar MNA technique. The interaction between electrical and mechanical components is accomplished by modeling the coupled energy between the domains. In this paper we demonstrate the capabilities of our syst...

In this contribution, a systematic method for the design of openand closedloop controllers for vibratory MEMS gyroscopes based on so-called envelope models will be presented. The methodology will be exemplarily carried out for a gyroscope with electrostatic actuation and read-out elements. The specifically designed capacitive actuators of the gyroscope are capable of compensating the system’s i...