This paper describes the design and analysis of a particular micro-electromechanical-system (MEMS) micromirror device that can be used for an optical switching application. Analytical expressions for electrostatic torque and restoring torque of serpentine springs are derived. The performance of the proposed structure is compared with the existing structures having straight torsional beams. The ...

Micro Electromechanical Systems (MEMS) have been proved to be outstanding tools for micromachines. The current article is intended to produce an assessment of MEMS used in a wide scale in various spheres, nearly 30 years after their initial development.Conventional sensors are now aptly supported by advanced technologies. Micro Electromechanical Sensors form a class of sensors which are sensiti...

We demonstrate an approach for probing nonlinear electromechanical responses in BiFeO(3) thin film nanocapacitors using half-harmonic band excitation piezoresponse force microscopy (PFM). Nonlinear PFM images of nanocapacitor arrays show clearly visible clusters of capacitors associated with variations of local leakage current through the BiFeO(3) film. Strain spectroscopy measurements and fini...

1 Peter H. Meckl, School of Mechanical Eng., Purdue University, 585 Purdue Mall, West Lafayette, IN 47907-2088, [email protected]. Abstract ? This paper describes an elective course on Microprocessors in Electromechanical Systems, taught in Purdue’s School of Mechanical Engineering. The course uses a Motorola 68HC12 microcontroller in a sequence of laboratory exercises to introduce students ...

This paper reports result of calculation and experimental realization of an electromechanical system that consists of a high-Q mechanical oscillator parametrically coupled in the manner of a capacitive transducer with a radio frequency (RF) circuit, which is in turn inductively coupled with another RF circuit. The system operates in the resolved sideband regime when the mechanical oscillator's ...

A Modelica-Based Domain-Specific Framework for Electromechanical System Design was developed. The intended goal of this framework is to be used in early design phases in order to size physical architectures of electromechanical airbrake system. It has been developed using a generic methodology for the development of interoperable and modeldriven system design frameworks. It is based on domain-s...

Micro-electromechanical resonators substantially exhibit bistable and hysteretic response when nonlinear characteristics appear. Badzey et al. reported that the nonlinear micro-electromechanical resonators can be used as a mechanical 1 bit memory. Based on their results, the authors propose reading and writing operations of the memory device. The reading and writing operations imply a displacem...

We investigate the electromechanical coupling between a nanomechanical resonator and two parametrically coupled superconducting coplanar waveguide cavities that are driven by a two-mode squeezed microwave source. We show that, with the selective coupling of the resonator to the cavity Bogoliubov modes, the radiation-pressure type coupling can be greatly enhanced by several orders of magnitude, ...

An off-line identification method based on the least-squares approximation technique is applied for identifying of electromechanical parameters of a servo drive model. The proposed identification method solves a problem of experimental data automatic obtaining with angular velocity limitation and angle limitation. The developed algorithm can be automatically adjusted during its work to achieve ...

In this paper, a High-gain Observer (HGO)-based identification technique is used to identify the parameters for electromechanical servo systems. The HGO is used for estimating the system states, disturbances due to uncertainty or parameter changing, and output noise. Then, a new model is presented using QR factorization. The estimated observer states show good agreement with the system actual s...