Characterization of diamond-like carbon (DLC) coatings at cryogenic temperatures (down to 77 K) is presented, covering the electrical resistivity range practical interest gaseous and liquid particle instrumentation: 10^-1-10^5 Mohm/sq. The good behaviour observed in terms linearity, surface uniformity stability with time transported charge add other well-known characteristics like low chemical ...

Diamond like carbon (DLC) films were deposited on Si and then patterned to form 40 nm features as nanoimprint templates. A plasma enhanced chemical vapor deposition (PECVD) system with CH4 precursor was used to deposit DLC films on Si and quartz substrates. These films were then characterized using Raman spectroscopy, atomic force microscopy (AFM), nanoindentation, and contact angle measurement...

This study explored the effects of cryogenic treatment on the microstructure, hardness, and wear-resistance of diamond-like carbon (DLC) by cryogenically treating NAK 80 mold steel coated with DLC. Raman spectroscopy analyzed the structure of the DLC film. Nanoindenter analyzed the hardness and Young’s modulus of the film, and their relationship determined the wear resistance. Wear test assesse...

The interaction between resist and template during the separation process after nanoimprint lithography (NIL) can cause the formation of defects and damage to the templates and resist patterns. To alleviate these problems, fluorinated self-assembled monolayers (F-SAMs, i.e. tridecafluoro-1,1,2,2,tetrahydrooctyl trichlorosilane or FDTS) have been employed as template release coatings. However, w...

The hemocompatibility of plasma-treated, silicon-incorporated, diamond-like carbon (Si-DLC) films was investigated. Si-DLC films with a Si concentration of 2at.% were prepared on Si (100) or Nitinol substrates using a capacitively coupled radiofrequency plasma-assisted chemical vapor deposition method using a mixed gas of benzene (C(6)H(6)) and diluted silane (SiH(4):H(2)=10:90). The Si-DLC fil...

Nitrogenated, tetrahedral amorphous carbon (ta-C) ®lms prepared by the ®ltered cathodic vacuum arc (FCVA) technique have been studied using ultraviolet (UV, 244 nm) and visible (514 nm) micro-Raman scattering. The nitrogen ions were produced by a RF ion-beam source with a nitrogen ̄ow-rate varying from 0 to 10.0 sccm, which results in a nitrogen content from 0 to 10.8 at.% in the deposited ®lms...