Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering characterization, and reliability evaluations. MEMS testing has had limited visibility in literature from companies that have successfully industrialized applications such as pressure sensors and accelerometers. This l...

In this paper we present the design and fabrication of an RF MEMS tunable band-pass filter. The band-pass filter design uses both distributed transmission lines and RF MEMS capacitances together to replace the lumped elements. The use of RF MEMS variable capacitances gives the flexibility of tuning both the centre frequency and the band-width of the band-pass filter. A prototype of the tunable ...

We combine here two well-known and established concepts: microelectromechanical systems (MEMS) and neurocomputing. First, we consider MEMS oscillators having low amplitude activity and we derive a simple mathematical model that describes nonlinear phase-locking dynamics in them. Then, we investigate a theoretical possibility of using MEMS oscillators to build an oscillatory neurocomputer having...

this article describes an accurate subpico flowmeter bifurcatedin to liquid and gas flowrates less than 1mol/s for both mems/nems and cryogenic technology applications. the mems/nems are described as either two gauges (instrument), or quartz fluctuating forks, even if the liquid or gas flows through an element, as well as cryogenic technology consisting of arrays of either parallel photonic cry...

MEMS (micro-electro-mechanical-systems) device has been a promising and fascinating topic in both mechanical and electrical engineering domains for decades with the revolutionary contributions to the contemporary micro-scale instruments especially for the micro-actuator and micro-sensor. Among the versatile material foundation to build up the MEMS device, silicon wafer is preferred to due to th...

Metamaterials, materials that are constructed with arrays of small elements have significant potential to provide material properties that are useful for electromagnetic applications but are not found in nature. Slight changes to a repeated unit cell can be used to tune the effective bulk material properties of a metamaterial, replacing the need to discover suitable materials for an application...