We are developing physical design tools for surfacemicromachined MEMS, such as polysilicon microstructures built using MCNC’s Multi-User MEMS Process service. Our initial efforts include automation of layout synthesis and behavioral simulation from a MEMS schematic representation. As an example, layout synthesis of a folded-flexure electrostatic combdrive microresonator is demonstrated. Lumpedp...

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified...

in this paper, a robust pid control scheme is proposed for micro-electro-mechanical-systems(mems) optical switches. the proposed approach is designed in a way which solves twochallenging and important problems. the first one is successful reference tracking and the second ismitigating the system nonlinearities. the overall system composed of nonlinear mems dynamicsand the pid controller is prov...

2010 WILEY-VCH Verlag Gmb Standard photolithography-based methods for fabricating microelectromechanical systems (MEMS) present several drawbacks including incompatibility with flexible substrates and limitations to wafer-sized device arrays. In addition, it is difficult to translate the favorable economic scaling seen in the capital equipment-intensive microelectronics industry to the manufact...

Microelectromechanical systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and, thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This...

Nanomechanics and structural design of MEMS are intimately tied together. As mechanical properties of hard materials are found to be strongly sample-size dependent, new criteria are in demand for size-dependent structural analysis and design of MEMS components. The paper offers a critical survey of some of the most interesting and challenging advances in nanomechanics of metals from a MEMS desi...

Research and evelopment of microelectromechanical systems (MEMS) has hown a significant promise for a variety of commercial applications. For example, accelerometers are widely used for air bag in automobile, MEMS inkjet print heads re used for printers, gyroscopes for guidance and navigation and pressure sensors for various industrial applications. Some of the MEMS devices have potential to be...

MEMS, or Micro-Electro-Mechanical Systems are chips that are made in semiconductor fabs that combine electronic functions and mechanical actions. MEMS devices can sense and control making them valuable for numerous applications that include ink jet printers, automotive motion sensors and even digital projectors. But MEMS can also be used in the medical field to measure blood pressure within the...

The objective of this work is to propose Pulsed Digital Oscillators as a possible tool for the in situ monitoring of MEMS in space applications. The reliability of MEMS devices is an important issue for space applications. These devices are prone to mechanical as well as electrical damages. Although extensive knowledge exists on the failure mechanisms of microelectronic devices, there is no sta...