The reconfigurable antenna based on RF-MEMS is hot researching direction in recent years,it can change electric parameters,such as radiation pattern,working band, input impedance, polarization diversity ,and so on. reconfigurable antenna of multi-band and multi-mode can replace multiple antennas based on one vehicle,decreases the developing price,size and weight of antennas,which is very import...

Experimental measurements and modeling predictions were obtained to characterize the electro-mechanical response of two different gold contact radio frequency microelectromechanical system (RF MEMS) switches due to variations in the temperature and applied contact voltage. A three-dimensional surface roughness profile from AFM measurements of the top contact surface of a sample RF MEMS switch w...

Radio frequency (RF) microelectromechanical systems (MEMS) have been pursued for more than a decade as a solution of high-performance on-chip fixed, tunable and reconfigurable circuits. This paper reviews our research work on RF MEMS switches and switching circuits in the past five years. The research work first concentrates on the development of lateral DC-contact switches and capacitive shunt...

In this paper, the reliability of capacitive shunt RF MEMS switches have been investigated using three dimensional (3D) coupled multiphysics finite element (FE) analysis. The coupled field analysis involved three consecutive multiphysics interactions. The first interaction is characterized as a two-way sequential electromagnetic (EM)-thermal field coupling. The second interaction represented a ...

Fabrication of Micro-Electro-Mechanical-Systems (MEMS) requires deposition of films such as SiO2, Si3N4, ZnO, polysilicon, phosphosilicate glass (PSG), Al, Cr-Au, Pt, etc. for use as structural, sacrificial, piezoelectric and conducting material. Deposition of these materials at low temperature is desirable for fabricating sensors/actuators on temperature-sensitive substrates and also for integ...