Herein we report on the synthesis of a metastable (Cr,Y)2AlC MAX phase solid solution by co-sputtering from composite Cr-Al-C and elemental Y target, at room temperature, followed annealing. While direct high-temperature resulted in multiphase films, as evidenced X-ray diffraction analyses, temperature depositions, annealing to 760 {\deg}C led formation pure diffusion. Higher temperatures cause...