The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ~980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were...

In this work, we have developed the glass‐based capacitive micromachined ultrasound transducers (G‐CMUTs). The sacrificial layer etching process flow employed for manufacturing of G‐CMUTs is reported. Specific has significant promise acoustic property with ~130 % bandwidth at ~8.2 MHz. Real time in‐vivo imaging capability demonstrates actual usability technology medical imaging.

The authors present a simplified fabrication method for the creation of free-standing dielectric mirrors for use in monolithic wavelength tunable surface-normal photonic devices, including vertical-cavity surface emitting lasers. This process utilizes a nonplasma dry etching process, based on the noble gas halide, xenon difluoride XeF2 , to remove an inorganic sacrificial film comprised of low-...

Graphene oxide (GO) membranes have demonstrated great potential in gas separation and liquid filtration. For upscale applications, GO membranes in a hollow fibre geometry are of particular interest due to the high-efficiency and easy-assembly features at module level. However, GO membranes were found unstable in dry state on ceramic hollow fibre substrates, mainly due to the drying-related shri...

Vein differentiation is controlled by groups of genes that act in two developmentally distinct phases. During mid-third larval instar and early prepupal stages, the positions of vein territories are defined within the monolayer of wing imaginal disc cells (reviewed by Bier, 2000). In the second phase of vein development, during pupal stages, the vein versus intervein cell fate choice is resolve...

We fabricate grating-structured metallic microsprings with well-defined helical angles and diameters, which are self-rolled from strained nanomembranes patterned with gratings. The grating structures on the metal membrane, replicated from the imprinted polymer layer beneath, give rise to the controlled rolling direction after selective etching of the underlying sacrificial layer. The rolling di...

By combining substrate-free structures with anodic bonding technology, we present a simple and efficient micro-electro-mechanical system (MEMS) thermal shear stress sensor. Significantly, the resulting depth of the vacuum cavity of the sensor is determined by the thickness of silicon substrate at which Si is removed by anisotropic wet etching process. Compared with the sensor based on a sacrifi...

We present two fast and generic methods for the fabrication of polymeric microfluidic systems using electron beam lithography: one that employs spatially varying electron-beam energy to expose to different depths a negative electron-beam resist, and another that employs a spatially varying electron-beam dose to differentially expose a bi-layer resist structure. Using these methods, we demonstra...