.................................................................................................................................. IV ACKNOWLEDGEMENTS .......................................................................................................... VI LIST OF FIGURES .........................................................................................................

Upgraded metallurgical grade silicon (UMG-Si) for photovoltaic (PV) solar applications has been manufactured through the route by means of process developed Ferrosolar. In an ambitious mass production test, performed in commercial cells and modules lines, was proven to be appropriate photovoltaics (Fornies et al., 2019 Mass test made 100% umg silicon. 20.76% record efficiency. Energies 12), rea...

Incorporation of microelectromechanical system (MEMS) oscillators into devices has been limited by the lack of an easily-integrated motional detection scheme. A capacitive detection scheme enabled by impedance matching techniques has been demonstrated for nanowires. However, no measurement had been demonstrated in micron-scale oscillators of interest in sensor and electrical filter applications...

This paper mvestlgates the elcctrostatlc dnve and sense of polynhcon resonators parallel to the substrate, using an mterdlgtated capacitor (electrostatic comb) Three expenmental methods are used nucroscoplc observation mth contmuous or stroboscopic iummatlon, capacltlve sensing using an amphtude-modulation technique and SEM observation The mtnnslc quality factor of the phosphorus-doped low-pres...

We propose and demonstrate a novel approach to obtaining small-core polysilicon waveguides from the silicon fiber platform. The fibers were fabricated via a conventional drawing tower method and, subsequently, tapered down to achieve silicon core diameters of ∼1  μm, the smallest optical cores for this class of fiber to date. Characterization of the material properties have shown that the taper...

We have fabricated small core polysilicon waveguides by tapering bulk, as-drawn silicon optical fibers. The taper process acts to improve the local crystallinity of the core, resulting in a significant reduction in the material loss. OCIS codes: (060.2280) Fiber design and fabrication; (060.2290) Fiber materials; (060.4370) Nonlinear optics, fibers; (060.6000) Semiconductor Materials.

— A microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Devices are constructed in a batch-fabrication process that combines electroplating with conventional lithography, materials, and equipment. A microactuator consisting of a 400x(47-40)x7 µm 3 rectangular plate of NiFe attached to a 400x(0.9-1.4)x2.25 µm 3 polysilicon cantilever beam...

This paper presents the design, fabrication, and testing of an 80m-thick, 1.1 mm in diameter high aspect-ratio (20:1) polysilicon ring gyroscope (PRG). The vibrating ring gyroscope was fabricated through the high aspect-ratio combined poly and single-crystal silicon MEMS technology (HARPSS). This all-silicon single-wafer technology is capable of producing electrically isolated vertical electrod...

Continuing advances in silicon integrated circuit technology lead to todays very large scale integrated circuits with several millions of transistors per single chip. High density and low power consumption advantage made CMOS technology to the leading silicon fabrication technology. Over the last decade the demand for higher speed and better analog circuit gave rise to the BiCMOS technology, wh...