Electron beam lithography (EBL) is widely used in nanoscale device fabrication and research due to high resolution and excellent flexibility. In this paper, nanometer EBL system based on scanning electron microscope (SEM) is introduced. Its main components include a modified SEM, a laser interferometer controlled stage, a versatile high speed pattern generator, and a fully functional and easyop...

We report on progress towards a neutral atom imaging device that will be used for chemically sensitive surface microscopy and nanofabrication. Our novel technique for improving refractive power and correcting chromatic aberration in atom lenses is based on a fundamental paradigm shift from continuous-beam focusing to a pulsed, three-dimensional approach. Simulations of this system suggest that ...

In this work, we introduce a maskless, resist-free rapid prototyping method to fabricate three-dimensional structures using electron beam induced deposition (EBID) of amorphous carbon (aC) from a residual hydrocarbon precursor in combination with metal-assisted chemical etching (MaCE) of silicon. We demonstrate that EBID-made patterned aC coating, with thickness of even a few nanometers, acts a...

The behavior of nanoscale energetic materials is quite different from micronsized energetic materials in many ways. Recently, some techniques such as sol-gel method, high speed air impaction and vacuum codeposition have been employed to obtain nanoscale energetic materials. However, only few attentions were paid to nanoscale energetic materials because of the fabrication difficulty. In this pap...

In the quest to miniaturise photonics, it is of paramount importance to control light at the nanoscale. We reveal the main physical mechanism responsible for operation of gap plasmon-based gradient metasurfaces, comprising a periodic arrangement of metal nanobricks, and suggest that two degrees of freedom in the nanobrick geometry allow one to independently control the reflection phases of orth...

In order to impede infection and achieve accelerated wound healing in the postorthopaedic surgery patients, a simple and benign procedure for creating nanotubular or nanofibrillar structure of photoactive TiO(2) on the surface of Ti plates and wires is described. The nanoscale TiO(2) films on titanium were grown by hydrothermal processing in one case and by anodization in the presence of dilute...

INTRODUCTION Recently, fabrication of nanodots structure of various materials has attracted intense scientific interests because of their great potentials for wide technological applications. Metal nanoscale dots that exhibit unique properties based on their nano size effects are expected to be the building blocks of new functional nanodevices, such as catalysis, environmental remediation, DNA ...

Quickly developing nanotechnology drives the industrial need for fast but sensitive nano-scale feature detection and evaluation. In this work we bypass the diffraction limit for achieving nanoscale sensitivity by introducing optical singularities into the illuminating beam for a modified laser scanning microscopic architecture. A good correspondence was obtained between laboratory experiments a...

We present a theoretical investigation of stiction in nanoscale electromechanical contact switches. We develop a mathematical model to describe the deflection of a cantilever beam in response to both electrostatic and van der Waals forces. Particular focus is given to the question of whether adhesive van der Waals forces cause the cantilever to remain in the 'ON' state even when the electrostat...

It has been demonstrated that the mechanical properties of materials change significantly when external dimensions are confined to the nanoscale. Currently, the dominant fabrication method for mechanical testing specimens with nanometer dimensions is by using focused ion beam (FIB) milling, which results in inevitable Ga(+) induced damage to the microstructure. Here, we report a FIB-less fabric...