Focused ion beam tomography has proven to be capable of imaging porous structures on a nano-scale. However, due to shine-through artefacts, common segmentation algorithms often lead to severe dislocation of individual structures in z-direction. Recently, a number of approaches have been developed, which take into account the specific nature of focused ion beam-scanning electron microscope image...

Cathodoluminescence spectra of lamellar gratings have Gaussian profiles centered at ~600 nm independent of grating amplitude (0.1 to 4.6 microns), grating period (0.1 to 20 microns), material (metal, semimetal, or semiconductor), or e-beam energy, but the band blue-shifts somewhat with increasing e-beam current. A periodic modulation with wavelength appears for the higher grating amplitudes due...

Since the transmission of anisotropic nano-structures is sensitive to the polarisation of an incident beam, a novel polarising beam splitter (PBS) based on silicon nanobrick arrays is proposed. With careful design of such structures, an incident beam with polarisation direction aligned with the long axis of the nanobrick is almost totally reflected (~98.5%), whilst that along the short axis is ...

This work reviews different types of substrates used for surface-enhanced Raman scattering (SERS) that have been developed in the last 10 years. The different techniques of self-assembly to immobilize metallic nanoparticles on solid support are covered. An overview of SERS platforms developed using nanolithography methods, including electron-beam (e-beam) lithography and focused ion beam (FIB) ...

A technique developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel “paddle” cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution. Standard clean room processing was used to pre...

We report a Silicon nano-opto-mechanical device in which a nanomechanical doubly-clamped beam resonator is integrated to an optical microdisk cavity. Small flexural oscillations of the beam cause intensity modulations in the circulating optical field in the nearby microdisk cavity. By monitoring the corresponding fluctuations in the cavity transmission via a fiber-taper, one can detect these os...

We present a method for submicron fabrication of flexible, thin-film structures fully encapsulated in biocompatible polymer poly (chloro-p-xylylene) (Parylene C) that improves feature size and resolution by an order of magnitude compared with prior work. We achieved critical dimensions as small as 250 nm by adapting electron beam lithography for use on vapor deposited Parylene-coated substrates...

Nano-Kirigami Cutting of the Si3N4 membrane is performed with a Ne or He FIB. A broad dosage from Ga FIB then induces bending membrane. The beam optionally used grow vertical pillars before and after bending. All images created beam; center scale bar 200 nm. This reported by Deying Xia John Notte in article number 2200696.

Silver metal clusters have been formed in soda lime glass by high-energy heavy ion diation at ISL. The metal cluster formation was detected with X-ray absorption spe copy (EXAFS) in fluorescence mode, and the shape of the clusters was imaged transmission electron microscopy. While annealing in reducing atmosphere alone a leads to the formation of metal clusters in Ag containing glasses, where t...

In this paper, a remote O2 ion source is used for the formation of nano-oxide layers. The oxidation efficiency was measured in CoFe-oxide films, and a decrease of the oxide layer with the pan angle and the oxidation pressure is observed. For the same oxidation pressure, the oxidation efficiency depends on the O2 content in the Ar–O2 plasma. These results were applied in optimizing the fabricati...