Our paper presents a non-destructive thermal transient measurement method that is able to reveal differences even in the micron size range of MEMS structures. Devices of the same design can have differences in their sacrificial layers as consequence of the differences in their manufacturing processes e.g. different etching times. We have made simulations examining how the etching quality reflec...

This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upo...

In this paper, the design and construction of a new violin interface, the Hyperbow, is discussed. The motivation driving the research of this instrument was the desire to create a violin bow capable of measuring the most intricate aspects of violin technique–the subtle elements of physical gesture that immediately and directly impact the sound of the instrument while playing. In order to provid...

—The measurement precision of Micro Electronic Mechanical System (MEMS) accelerometer are influenced by zero drift, scale factor and installation error. In order to increase the measurement accuracy of the MEMS accelerometer, an improved calibration method is proposed on the basis of traditional six position method. The raw measurements of the MEMS accelerometer not divided by the scale factor...

Many existing computer-aided design systems for microelectromechanical systems require the generation of a three-dimensional mesh for computational analysis of the microdevice. Mesh generation requirements for microdevices are very complicated because of the presence of mixed-energy domains. Point methods or meshless methods do not require the generation of a mesh, and computational analysis ca...

The resonant frequencies of released microcantilevers, microbeams, and microplates are among the most important response characteristics for microelectromechanical systems such as resonators, sensors, and radio frequency (RF) switches. It is generally believed that the resonance frequencies of such structures decrease monotonically as the surrounding gas pressure is increased from vacuum condit...