This paper presents Artificial Neural Network (ANN) implementation for the Radio Frequency (RF) and Mechanical modeling of lateral RF Micro Electro Mechanical System (MEMS) series micro machined Single pole double through (SPDT) switch. We propose an efficient approach based on ANN for analyzing the losses in ON and OFF state of lateral RF MEMS series switch by calculating the S-parameters. The...

In this study, both full 3D electromagnetic and equivalent circuit modelling of a radio frequency microelectromechanical systems (RF MEMS) single-pole eight-throw rotary switch are reported for the first time. Excellent agreement has been achieved between measurements and modelled performance for frequencies up to 12 GHz. In order to validate the effectiveness of the modelling, a 2-bit true tim...

In this paper a new structure for RF MEMS switches is proposed. This structure is introduced to remove self-actuation and latching phenomena. Particle Swarm Optimization (PSO) algorithm is utilized to obtain optimum results automatically. Also a method is described to reduce computational costs of the problem. Based on the executed simulations by HFSS, the designed switch shows 14 dB isolation ...

In this paper, RF MEMS switch with capacitive contact is designed and analyzed for Ka band application. A fixed-fixed beam/meander configuration has been used to design the frequency 10 GHz 40 GHz. Electromagnetic electromechanical analysis of three-dimensional (3D) structure/design in multiple finite element method (FEM) based full-wave simulator (Coventorware high-frequency structure simulato...

This paper presents the equivalent circuit modelling and eigenfrequency analysis of a wideband robust capacitive radio frequency (RF) microelectromechanical system (MEMS) switch that was designed using Poly-Si and Au layer membrane for highly reliable switching operation. The circuit characterization includes the extraction of resistance, inductance, on and off state capacitance, and Q-factor. ...

The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve h...

This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires low actuation voltage (5 to 20 V), facilitates active pull-off to open the switch and exhibits f...