Free vibration of an axially loaded silicon microbeam in MEMS under electrostatic actuation is studied on the basis a sinusoidal shear deformation theory. Based modified couple stress theory (MCST) and von Kármán geometric nonlinearity, nonlinear finite element formulation derived employed to construct discrete governing equations for microbeam. The deflection at given DC voltage firstly calcul...

Perhaps the most widely known nonlinear phenomena in nanoand microelectromechanical systems is the “pull-in” or “jump-to-contact” instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state configuration of the device where mechanical members remain separate. This instability affects the design of many devices. It may...

Micromachined microphones that use a diffraction-based optical method for integrated interferometric detection of diaphragm displacement are described. With optoelectronics integration, this approach yields highly sensitive microphones in mm-cube volumes. Furthermore, the electrical port of the device, which is freed by optical detection, is used for electrostatic actuation of the microphone di...

Classical continuum mechanics is used extensively to predict the properties of nanoscale materials such as graphene. The bending rigidity, κ, is an important parameter that is used, for example, to predict the performance of graphene nanoelectromechanical devices and also ripple formation. Despite its importance, there is a large spread in the theoretical predictions of κ for few-layer graphene...

In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the internal fluid. The results indicate that the system is subjected to both the pull-in instability and t...

Pulsed energization of electrostatic precipitator (ESP) may represent one of the most promising solutions to comply with strict environmental regulation in case of high resistivity dust. Performs a parametric cost comparison between conventional and pulsed ESP with reference to four main industrial areas: electric power generation, cement manufacturing, iron and steel production, glass industry...

Electrostatically-actuated resonant microbeam devices have garnered significant attention due to their geometric simplicity and broad applicability. Recently, some of this focus has turned to comb-driven microresonators with purely-parametric excitation, as such systems not only exhibit the inherent benefits of MEMS devices, but also a general improvement in sensitivity, stopband attenuation an...

This paper presents the design, fabrication and characterization of an RF MEMS switch. Low actuation voltage and high isolation of the switch were achieved by exploiting buckling and bending effects induced by well-controlled residual stress. The effects of residual stress on improving the switch performance have been investigated using both analytical and numerical methods. The proposed RF swi...

This paper presents the design, fabrication and measurement of the first pull-in free tunable evanescent-mode microwave resonator based on arrays of electrostatically actuated fringing-field RF-MEMS tuners. Electrostatic fringing-field actuation (EFFA) is the key on achieving a wide tunable frequency range that is not limited by the conventional pull-in instability. Furthermore, total lack of d...