In planar-integrated free-space optics (PIFSO) [1] the systems approach of which is shown schematically in Abb.1 signals may have to bounce up and down a considerable number of times inside a planar transparent substrate to reach their destinations. To obtain a high coupling efficiency it is therefore mandatory to cover the optical elements with a high-reflectance coating. Thin metal films are ...

We present a homogenization technique for rarefied gas flow over a microstructured surface consisting of patterns of periodic features. The length scale of the model domain is comparable to the mean free path of the molecules, while the scale of the surface patterns is much smaller. The flow is modeled by a system of linear Boltzmann equations with a diffusive boundary condition at the patterne...

Deposition rates, wet etch rates, and thickness uniformity experiments were performed using O3/TEOS thermal chemical-vapor deposition. Our results for oxide deposition show optimum process window around 200 Torr for producing films of good quality ~uniformity and material properties!. This is in excellent agreement with the modeling predictions over a broad range of pressure ~100–600 Torr! and ...

Phase Transitions and High-Voltage Electrochemical Behavior of LiCoO2 Thin Films Grown by Pulsed Laser Deposition H. Xia, L. Lu, Y. S. Meng, and G. Ceder* Advanced Materials for Microand Nano-System, Singapore-MIT Alliance, Singapore 117576 Department of Mechanical Engineering, National University of Singapore, Singapore 117576 Department of Materials Science and Engineering, Massachusetts Inst...

We present a comparison of models describing the pyrolytic deposition of SiO2 with a low pressure chemical vapor deposition process. In order to meet industrial simulation requirements, e.g. accuracy and fast delivery of results, we present an overview of established and new models, their use within TCAD applications, and their best results which have been obtained by calibrations according to ...

3 Preface 4 List of publications 5 List of symbols and abbreviations 6