Errors resulting from magnification variations of optical system are largely generated in threemensional shape measurements based on depth-from-focus. Focus measures are wrongly or ambiguously tracted, due to the variations. In this paper, a DFF-based methodology considering these magnification riations is proposed to make accurate measurements in surface morphology with high depth discontinuit...

We present the design and performance of a highresolution, high charge sensitivity imaging camera system for the APS linac beam profile measurement. Electron beam distribution is converted to light intensity distribution using standard YAG or optical transition radiation (OTR) screens. Two CCD cameras share the light through a beam splitter, each with its own imaging optics. One camera is norma...