A quantitative model capturing pattern density effects in Deep Reactive Ion Etch (DRIE), which are important in MEMS, is presented. Our previous work has explored the causes of wafer-level variation and demonstrated die-to-die interactions resulting from pattern density and reactant species consumption. Several reports have focused on experimental evidence and modeling of feature level (aspect ...

Rotators interacting with a pendulum via small, velocity independent, potentials are considered: the invariant tori with diophantine rotation numbers are unstable and have stable and unstable manifolds (\whiskers"), whose intersections deene a set of homoclinic points. The homoclinic splitting can be introduced as a measure of the splitting of the stable and unstable manifolds near to any homoc...

A two-level overlapping domain decomposition method is analyzed for a Nédélec spectral element approximation of a model problem appearing in the solution of Maxwell’s equations. The overlap between subdomains can consist of entire spectral elements or rectangular subsets of spectral elements. For fixed relative overlap and overlap made from entire elements, the condition number of the method is...

Resistive switching random access memory (RRAM) is one of the most promising candidates with high-density three-dimensional integration characteristics for next-generation nonvolatile technology. However, poor uniformity issue caused by stochastic property conductive filament (CF) impedes large-scale manufacture RRAM chips. Subulate array has been introduced into to minimize CF randomness, but ...

We generalize various notions of generalized metrics even further to one general concept comprising them all. For convenience, we turn around the ordering in the target domain of the generalized metrics so that we speak of similarity instead of distance. Starting from an extremely general situation without axioms, we examine which axioms or additional properties are needed to obtain useful resu...

Here we present the principal ideas and results of [5] with some indications of proof. We introduce the notion of measure-theoretic uniformity, and we describe its use in recursion theory, hyperarithmetic analysis, and set theory. In recursion theory we show that the set of all sets T such that the ordinals recursive in T are the recursive ordinals has measure 1. In set theory we obtain all of ...

The ε term is referred to by numerous synonyms in the literature like stochastic noise, biological variance, and error but is more commonly discussed as the inverse (ε−1) using words like uniformity, canalization, robustness, or stability depending upon the research field. In evolutionary theory, canalization is utilized to refer to the idea that selection functions to minimize the error (maxim...