The microelectronic department at LIRMM has developed, in the past few years, various types of MEMS sensors. The particularity of our group is to design MEMS that can be integrated either in a System on Chip (SoC) or in a System in Package (SiP) approaches. Therefore, the purpose of this demonstration is to show the feasibility of a silicon attitude sensor using 2 MEMS magnetometers, 2 MEMS the...

GPS-aided MEMS-based inertial navigation systems is a topic of intense interest. In this paper a MEMS-IMU/GPS integrated system based on the PC104 platform is implemented and the time synchronization solution is discussed. Because of the analogue constant voltage outputs of the MEMS-IMU in the process of calibration, a method of testing the accuracy of time synchronization was developed. Some e...

We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our inpu...

for microelectromechanical systems (MEMS) emerge, research efforts shift toward the design of systems of increasing complexity. Focusing on higher-level design issues is being made possible by the development of hierarchical cell design methodologies, libraries of characterized MEMS elements, mixed-technology simulators, layout synthesis tools, and design rule checking tools. By incorporating a...

Hitherto the MEMS field has evolved with the semiconductor industry where silicon is the predominant material. As the MEMS sector expands and diversifies, research focuses on new optimised materials with respect to the functional requirements (e.g. low cost, flexibility, optical transparency, biocompatibility and large surface) of future electronic devices [1]. To this end, substituting rigid i...

MEMS technology offers some unique product opportunities for optical networking applications. One of the critical factors that determine the commercial success of any optical MEMS components is the cost for packaging and optical fiber alignment. Small form factor MEMS components such as protection switches and variable optical attenuators require the integration of optical fibers and lenses wit...

In this paper we focus on electromechanical modeling of high-tuning range MEMS varactors with a focus on failures caused by residual compressive stress. In particular, we quantitatively evaluate for the first time a high-tuning range parallel-plate MEMS varactor in the presence of residual compressive stress. A 3D model generated in ANSYS agrees very favorably with the measured data and explain...

The mobile technology is one of the rapidly developing technologies in the present embedded market. For this reason the designers are facing so many challenges to get the efficient products. Nowadays the Embedded MEMS (Microelectromechanical System) is one technology which is creating a new era in the field of mobile technology. The purpose of this paper is to gives an idea about the recent imp...

Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering characterization, and reliability evaluations. MEMS testing has had limited visibility in literature from companies that have successfully industrialized applications such as pressure sensors and accelerometers. This l...

In this paper we present the design and fabrication of an RF MEMS tunable band-pass filter. The band-pass filter design uses both distributed transmission lines and RF MEMS capacitances together to replace the lumped elements. The use of RF MEMS variable capacitances gives the flexibility of tuning both the centre frequency and the band-width of the band-pass filter. A prototype of the tunable ...