We describe a wireless system for actuating and detecting the motion of MHz-frequency, low dissipation MEMS resonators. The overall system is essentially a custom-designed RFID-like system, with the tags based upon unique MEMS chips as opposed to conventional RFID chips. The MEMS devices are vacuum encapsulated, rugged, CMOS-compatible, and are approximately 1mm-by-1mm-by-0.5mm. The system is p...

The modeling of MEMS structures using MRTD is presented. Many complex RF structures have been inadequately studied due to limitations in simulation methods. The space and time adaptive grid, as well as the ability to handle intracell feature variations, makes MRTD an ideal method for modeling these structures. MRTD is shown to be able to handle the complex structures found in modern wireless an...