ABSTRACT Noria derivatives containing protective groups such as t-BOC group, t-butyl ester group (t-BAc), adamantyl group (Ad) were synthesized and evaluated as alkaline developable positive-type EBand EUV-resists. As the result, it was cleared that Noria-t-BOC and Noria-t-BAc showed 50 nm and 70 nm resolutions as EB-resists, respectively. Noria-Ad also showed clear line and space pattern with ...

The interaction of amphiphilic alternating copolymers of sodium maleate and dodecyl vinyl ether (Mal/C12) with a nonionic surfactant, Triton X-100 (TX), was investigated by frontal analysis continuous capillary electrophoresis (FACCE). The binding isotherms obtained from FACCE data were indicative of weak cooperative interaction for all the polymers examined. The cooperative interaction was als...