This paper reports on a project to develop SOG (Synthetic Occupancy Generator), a system to create realistic, but synthetic residential occupancy (name and address) histories as input for Entity Resolution (ER) processes. ER processes are intended to link records referencing the same, or related, real-world entities. Most organizations use some type of ER process to recognize their customers or...

new technique, at temperatures of 150°C or 450°C t provides planarization after a very deep etching step silicon is presented. Resist spinning and layer palerning as well as realization of bridges or cantilevers across deep holes becomes possible. The sacrificial wafer bonding technique contains a wafer bond step followed by an etch back. Results of (1) polymer bopding followed by dry etching a...

The fabrication of high optical quality inverse opals is challenging, requiring large size, three-dimensional ordered layers of high dielectric constant ratio. In this article, alumina/TiO2-air inverse opals with a 98.2% reflectivity peak at 798 nm having an area of 2 cm2 and a thickness of 17 µm are achieved using a sacrificial self-assembled structure of large thickness, which was produced wi...

This paper demonstrates a new method of implementing complex microchannels in PDMS, which is simply constructed using three-dimensional photoresist structures as a master mold for the PDMS replica process. The process utilizes UV-insensitive LOR resist as a sacrificial layer to levitate the structural photoresist. In addition, the thickness of photoresist structures can be controlled by multi-s...

The effects of the formation of an optical standing wave during femtosecond laser-induced forward transfer of transparent films is analyzed using a numerical interference model. The dependence of the intensity distribution on a number of easily controllable experimental parameters is investigated. Results of the model are compared to experimental studies of the transfer of gadolinium gallium ox...

The problem of thermal protection is explored for two idiosyncratic reactive systems, namely a sacrificial heat-sink material and an intumescent system where a dynamically evolving insulation layer is produced from an initially thin coating. Relatively simple mathematical models of both systems are proposed that encompass the important physical characteristics of each situation and these models...

This study presents a stable and flexible method for fabricating an integrated microfluidic system with lipid bilayers formed in a free-standing SU-8 membrane. For the fabrication of the SU-8 membranes, a combination of imprint lithography and a sacrificial layer technique was employed in order to obtain a clean, fully released, and mechanically stable membrane with perforated pores. The membra...

⎯ This article presents microchannel thermal flow sensors fabricated using standard micromachining technology. The sensors comprise of a SiXNY microchannel created by etching of a poly-Si sacrificial layer. The channels are released by KOH etching through inlets and outlets etched from the backside of the substrate. Liquid flow is measured by platinum resistors deposited on top of the microchan...

We report on the fabrication of quantum photonic integrated circuits based on suspended GaAs membranes. The fabrication process consists of a single lithographic step followed by inductively coupled-plasma dry etching through an electron-beam-resist mask and wet etching of a sacrificial layer. This method does not require depositing, etching, and stripping a hard mask, greatly reducing fabricat...