This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromach...

A systematic study was carried out to investigate the effect of ionic liquid in solid polymer electrolyte (SPE) and its layer morphology on the characteristics of an electrochemical amperometric nitrogen dioxide sensor. Five different ionic liquids were immobilized into a solid polymer electrolyte and key sensor parameters (sensitivity, response/recovery times, hysteresis and limit of detection...

Electrostatic sensor, which can also be called as triboelectric sensor or electrodynamic sensor, senses the electrostatic charge carried by the dry particle in pneumatic conveyor. Source of the signal induced on the electrostatic sensor is brought by the object to be measured and no excitation circuit is necessary. Electrostatic sensors are used in the process industry due their low cost and ro...

A wireless passive pressure measurement system for an 800 °C high-temperature environment is proposed and the impedance variation caused by the mutual coupling between a read antenna and a LC resonant sensor is analyzed. The system consists of a ceramic-based LC resonant sensor, a readout device for impedance phase interrogation, heat insulating material, and a composite temperature-pressure te...

A capacitive method for measuring hand grip position on a mobile phone equipped with a dual-band planar inverted-F antenna (PIFA) and a monopole antenna was studied using different electrode arrangements. A capacitive sensor with a dual-electrode configuration and an antenna-integrated capacitive sensor for hand grip recognition were developed. The sensitivities of the sensors were measured alo...

The refractive index sensing characteristics of the side-polished photonic crystal fiber (PCF) surface plasmon resonance (SPR) sensor are detailed investigated in this paper. We used the finite element method (FEM) to study the influences of the side-polished depth, air hole size, lattice constant, and the refractive index (RI) of the PCF material on sensing performance. The simulation results ...

Using a small-core single-mode fiber (SCSMF), a novel relative humidity (RH) sensor based on an SMF28-SCSMF-SMF28 fiber structure was proposed in this paper. By depositing a humidity sensitive material, such as poly (ethylene oxide) (PEO) on the bare SCSMF fiber, the proposed structure can act as an RH sensor with high sensitivity. Experiments demonstrated that the proposed RH sensor with PEO c...

In this paper, sensor selection algorithms are investigated based on a sensitivity analysis, and the capability of optimal sensors in predicting PEM fuel cell performance is also studied using test data. The fuel cell model is developed for generating the sensitivity matrix relating sensor measurements and fuel cell health parameters. From the sensitivity matrix, two sensor selection approaches...