The scalable array of ordered nano-pillars with precisely controllable quantum nanostructures (QNs) are ideal candidates for the exploration of the fundamental features of cavity quantum electrodynamics. It also has a great potential in the applications of innovative nano-optoelectronic devices for the future quantum communication and integrated photon circuits. Here, we present a synthesis of ...

Periodic micro- and nanostructures (gratings) have many significant applications in electronic, optical, magnetic, chemical and biological devices and materials. Traditional methods for fabricating gratings by writing with electrons, ions or a mechanical tip are limited to very small areas and suffer from extremely low throughput. Interference lithography can achieve relatively large fabricatio...

Line edge roughness is an important factor contributing to the problem of performance degradation in various nanoscale devices. We have developed two smoothing techniques based on nanoimprint lithography for the fabrication of nanoscale gratings with significantly reduced line edge roughness. Compared with other smoothing techniques reported before, our methods are low-cost, effective, and easy...