0026-2714/$ see front matter 2012 Elsevier Ltd. A http://dx.doi.org/10.1016/j.microrel.2012.06.029 ⇑ Corresponding author. E-mail address: [email protected] (H.A.C. Tilmans). This paper reviews various approaches to package MEMS, illustrated mainly with examples from imec. Wafer-level or 0-level packaging is mostly dealt with. The role the package plays in achieving the required performance and r...

This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due to the Coriolis Effect. The basic construction and operating principles of the gyroscope are described and illustrated. MEMS-based gyroscope output is presented at different yaw angular acceleration. The raw results ob...

Online monitoring remains an important requirement for a range of microsystems. The solution based on the injection of an actuating test stimulus into the bias structure of active devices holds great potential. This paper presents an improved solution that aims to remove the measurand-induced signal from the sensor output. It involves encoding the test stimulus and using a covariance algorithm ...

Photonic add-drop filters are crucial components for the implementation of wavelength division multiplexing (WDM) in fiber-optic communication systems. The recent progress photonic integration has shown potential to integrate alongside high-performance building blocks on a chip construct compact and complex photonic-integrated circuits WDM. Typically, implementations based micro-ring resonators...

MEMS technology and devices have proven their importance in facilitating single cell studies by providing quantitative information on cellular and sub-cellular levels. This paper reviews existing techniques for cellular and sub-cellular force measurement and molecular detection using MEMS-based devices. Literature on these techniques and sample devices is reviewed. The significance and limitati...

On November 29th, 2002, Professor Lung-Wen Tsai died peacefully at his home in Riverside, CA. Dr. Tsai was a member of our faculty since 2000. Dr. Tsai’s research interests included robotics, mechanisms and machine theory, design methodology, automotive engineering, and microelectromechanical systems. He was a Fellow of ASME (American Society of Mechanical Engineers) and AAS (American Associati...

In this report we present a summary of the system design issues for applications using wireless “smart” MEMS sensor networks. We give an overview of facts we learnt from previous work done in this field, the challenges we encountered and the different experiments we performed during a system design using wireless sensor networks. This report presents our preliminary findings and describes the a...

This paper presents the tolerance budgeting for the coarse assembly step in a novel coarse-fine strategy for micro-assembly. The final assembly step is to be performed using MEMS-based fimctionality that remains part of the product. Total tolerance build-up due to the coarse assembly and dimensional inaccuracies has been determined for the alignment of a single mode optical fibre to a laser dio...