We report design and fabrication process of MEMS (Micro Electro Mechanical Systems) actuators for a new type of optical switch integrated with photonic crystal (PhC) waveguides. Thin film poly-silicon electrostatic microactuator (either a cantilever or a bridge style) is placed over a PhC waveguide to induce optical modulation by means of mechanical motion in the evanescent fields. For low volt...

In this study, the free vibration analysis of smart vibration control (SVC) systems based on Reddy – Levinson model and modified strain gradient theory is developed. This system consist of a micro beam at middle and two magneto-electro-elastic (MEE) composite micro beams at top and bottom which connected by enclosing elastic medium and simulated by Winkler and Pasternak foundation. The effects ...

Hexapod locomotive Micro-Electro Mechanical Systems (MEMS) microrobot with Pulse-type Hardware Neural Networks (P-HNN) locomotion controlling system is presented in this chapter. MEMS microrobot is less than 5 mm width, length, and height in size. MEMS microrobot is made from a silicon wafer fabricated by micro fabrication technology to realize the small size mechanical components. The mechanic...

The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 ...

Getting Micro-Electro-Mechanical Systems (MEMS) out of a wafer after fabrication processes is of great interest in testing, packaging or simply using these devices. Actual solutions require special machines like wafer dicing machines, increasing time and cost of de-tethering MEMS. This article deals with a new solution for manufacturing mechanical de-tetherable silicon MEMS. The presented solut...

This review focuses on recent advances in microand nano-fabrication techniques and their applications to electrochemical power devices, specifically microfabricated Lithium-ion batteries, enzymatic and microbial fuel cells (biofuel cells), and dye-sensitized solar cells (DSSCs). Although the maturity of these three technologies ranges from market ready (batteries) to fundamental research (biofu...

the well-known electro-mechanical analogy that equates current, voltage, resistance, inductance and capacitance to force, velocity, damping, spring constant and mass has a shortcoming in that mass can only be used to simulate a capacitor which has one terminal connected to ground. a new model that was previously proposed by the authors that combines a mass with a pulley (mp) is shown to simulat...

A bulk acoustic mode micro-electro-mechanical dual resonator platform is utilised to study the evaporation of sub-microliter water droplets from the surface of the resonator. An analytical formulation for the observed frequency shift and the measure dependence of resonant frequency on the modes of evaporation which is consistent with the optically derived data. The resonators access only a thin...

A flexible 4 × 4 sensor array with 16 micro-scale capacitive units has been demonstrated based on flexible piezoelectric poly(vinylidene fluoride) (PVDF) film. The piezoelectricity and surface morphology of the PVDF were examined by optical imaging and piezoresponse force microscopy (PFM). The PFM shows phase contrast, indicating clear interface between the PVDF and electrode. The electro-mecha...