This paper presents a control strategy for micro-electro-mechanical systems (MEMS) z-axis gyroscope, based on the coupling of the fuzzy logic control with the so-called sliding mode control (SMC) approach and sliding mode observer. An adaptive model reference state tracking controller which can estimate the angular velocity vector, and the damping and stiffness model coefficients in real-time i...

Inertial navigation based on micro-electromechanical system (MEMS) inertial measurement units (IMUs) has attracted numerous researchers due to its high reliability and independence. The heading estimation, as one of the most important parts of inertial navigation, has been a research focus in this field. Heading estimation using magnetometers is perturbed by magnetic disturbances, such as indoo...

A novel x-axis tuning fork MEMS gyroscope with “8 vertical springs-proofmass” structure for Coriolis effect detection is presented. Compared with the common single-plane springs, the 8 vertical springs, symmetrically located at the top and bottom sides, more stably suspend the large thick proofmass featuring large capacitance variation and low mechanical noise. A bulkmicromachining technology i...

This paper investigates a fault-tolerant fixed-time prescribed performance microelectromechanical system gyroscope using the adaptive backstepping method. The control protocol is designed such that not only robust to even extremely harsh conditions of disturbance and actuator faults but also its settling time are user-adjustable. Also, itself along with external disturbances assumed be uncertai...

This paper presents a design and analysis of electromechanical sigma-delta modulator for MEMS gyroscope, which enables us to control the proof mass and to obtain an exact digital output without additional A/D conversion. The system structure and the circuit realization of the sigma-delta modulation are simpler than those of the analog sensing and feedback circuit. Based on the electrical sigma-...

Modern mobile phones contain a three-axis microelectromechanical system (MEMS) gyroscope, capable of taking accurate measurements the angular velocity along three principal axes phone with sampling rate 100 Hz or better. If is tossed in air, then, neglecting air resistance, it free rotation (rotation absence torque) respect to its centre mass, and phone's gyroscope can be used record rotational...