In this paper, we describe optical component and device technologies we have developed for next-generation photonic networks that achieve high tunability, high-speed transmission, and low power consumption. These include three-dimensional optical MEMS switches, acousto-opic tunable filters (AOTFs), lithium niobate optical modula-tors, and semiconductor lasers and optical amplifiers.

A micromechanical switch, dubbed the “resoswitch”, has been demonstrated that harnesses the resonance and nonlinear dynamical properties of its mechanical structure to greatly increase switching speed and cycle count (even under hot switching), and lower the needed actuation voltage, all by substantial factors over existing RF MEMS switches. The device comprises a wine-glass mode disk resonator...

RF-MEMS switches contain movable fragile parts. A specific packaging approach is required for reasons of protection during fabrication as well as during operation. We present in this paper a 0-level packaging process using a photopatternable polymer BenzoCycloButene and its performances measured up to 110 GHz.

This paper reviews the recent progress in MEMS for radio frequency (RF) applications from a device perspective. RF MEMS devices reviewed include switches and relays, tunable capacitors, integrated inductors, mechanical resonators and filters, and some representative microwave and millimetre-wave components. Important device parameters are highlighted, as they have significant contributions to t...

The RF MEMS technology has a great potential to replace conventional switching techniques and it can offer highly miniature switches and sensors with superior RF performance. The main principle of a RF MEMS based power senor is based on sensing the attractive electrostatic force between the signal line and a free standing electrode that is suspended at a small distance from the signal line. Key...

This paper presents the work realized on a new RF MEMS design for micro-switch application. This design relies on the separation between the commutation and actuation electrodes for improving the switch lifetime. The design can reduce electrical charging effects during the actuation by preventing a direct contact with the actuation electrode. The proposed structure is optimized by addressing ke...