The nonlinear electrostatic pull-in behaviour of MEMS Switches in micro-electromechanical systems (MEMS) is investigated in this article. We used the distributed model when the electrostatic pressure didn’t apply at the whole of the beam and applied only in the mid-part of the beam. In this part the electrostatic area is different from two other parts. The model uses Euler-Bernoulli beam theory...

Low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation. The RF MEMS switches were fabricated via a surface micromachining process using PI2545 Polyimide 1 as the sacrifici...

The reliability of MEMS based systems might be increased by the use of a Physics of Failure (PoF) methodology. This methodology necessitates the development of corresponding models that can be used for reliability evaluation. The model development is based on a good knowledge of effects of environmental influences on the MEMS. For the reliability evaluation of MEMS based systems the used models...

This work investigates the fabrication of a RF (ratio frequency) MEMS (micro elector mechanical system) switch using the standard 0.35 m 2P4M (double polysilicon four metal) CMOS (complementary metal oxide semiconductor) process and the post-process. The switch is a capacitive type, which is actuated by an electrostatic force. The structure of the switch consists of a CPW (coplanar waveguides) ...

Three-dimensional multiphysics finite element analysis (FEA) was performed to investigate the reliability of RF MEMS switches at various operational temperatures. The investigated MEMS capacitive switch consists of a freestanding metal membrane actuated by a bottom electrode coated by a dielectric film. Coupled-field simulations between thermal, structural and electrostatic domains were perform...

We built and evaluated a hybrid electrical-packet/optical-circuit network for datacenters using a 10 μs optical circuit switch using wavelength-selective switches based on binary MEMs. This network has the potential to support large-scale, dynamic datacenter workloads. © 2013 Optical Society of America OCIS codes: 060.4250, 060.4253,060.6718.

In this paper, the reliability of capacitive shunt RF MEMS switches have been investigated using three dimensional (3D) coupled multiphysics finite element (FE) analysis. The coupled field analysis involved three consecutive multiphysics interactions. The first interaction is characterized as a two-way sequential electromagnetic (EM)-thermal field coupling. The second interaction represented a ...

We are presenting an overview of MEMS-based (Micro-Electro-Mechanical System) optical switch technology starting from the reflective two-dimensional (2D) and three-dimensional (3D) MEMS implementations. To further increase the speed of the MEMS from these devices, the mirror size needs to be reduced. Small mirror size prevents efficient reflection but favors a diffraction-based approach. Two im...

Device encapsulation and packaging often constitutes a substantial part of the fabrication cost of micro electro-mechanical systems (MEMS) transducers and imaging sensor devices. In this paper, we propose a simple and cost-effective wafer-level capping method that utilizes a limited number of highly standardized process steps as well as low-cost materials. The proposed capping process is based ...

This paper presents the locomotion control of a microelectromechanical system (MEMS) microrobot. The MEMS microrobot demonstrates locomotion control by pulse-type hardware neural networks (P-HNN). P-HNN generate oscillatory patterns of electrical activity like those of living organisms. The basic component of P-HNN is a pulse-type hardware neuron model (P-HNM). The P-HNM has the same basic feat...