In this study, nine Nd-Fe-B and FeCe thin films with 10-50 nanometers width were prepared by RF magnetron sputtering on the Si/SiO2 substrate. Then, the films were annealed at 800 oC for 5 sec in rapid thermal annealing furnace. X-ray diffractometry (XRD) was used to analyze the phase composition of layers and existance of Nd2F14 and Fe65Co35 phase was confirmed, without formation of any o...
