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Fast and accurate quasi-three-dimensional capacitance determination of multilayer VLSI interconnects
A new fast and accurate capacitance determination methodology for intricate multilayer VLSI interconnects is presented. Since a multilayer interconnect structure is too complicated to be directly tractable, it is simplified by investigating charge distributions within the system. The quasi-three-dimensional (3-D) capacitances of the structure are then determined by combining a set of solid-grou...
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