The results of the modification atomic structure Pt surface after bombardment by accelerated beams Ar+ ions are presented. Field ion microscopy was used to study irradiated on an scale. From analysis contrast atomically clean platinum with Ar+, a large number radiation defects various types were found. Individual vacancies, interstitial atoms, Frenkel pairs, depleted zones, nanoclusters displac...

Molecular dynamics simulation is used to study argon ion bombardment of an initially perfect silicon crystal up to its damaged state at a total fluence of 4· 10 impacts/cm. Lower and higher energy processes are considered: one process with ions at 500 eV and another process with ions at 700 eV, which are like those used in a particular microelectromechanical systems (MEMS) fabrication technique...