In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...

During the last 20 years great advances have been made in the recognition of diaphragmatic hernia, and many series of cases reported by numerous authors have helped to place the diagnosis and treatment on a sound surgical basis (Dunhill, 1935; Barrett and Wheaton, 1934; Donovan. 1945; Morton, 1939; Harrington, 1940; Gross, 1946). More recently progress in thoracic surgery and anaesthesia has gi...

This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh's method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate ...

Reciprocating diaphragm micro-pumps are the most common type among indirectly–driven micro-pumps. They operate by reciprocating the diaphragm with associated check valves. This paper addresses the Hydroelastic vibration of circular elastic diaphragm interacting with the incompressible and inviscid liquid inside the cylindrical chamber with a central discharge opening. Taking into account axisym...

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...