A formidable challenge in the present multi-step Cu CMP process, employed in the ultra-large-scale integration (ULSI) technology, is the control of wafer surface non-uniformity, which primarily is due to dielectric erosion and Cu dishing. In contrast with the earlier experimental and semi-theoretical investigations, a systematic way of characterizing and modeling dielectric erosion in both sing...

In recent years, the nature of the complex interactions between the solid earth and the overlying atmosphere has been the subject of much debate (England and Molnar 1990; Whipple et al. 1999; Braun et al. 1999). Does erosion play an important role in the dynamics of mountain building? Is there a strong feedback into the balance of forces at the crustal scale from mass transport by erosional and...

The study aimed to compare the dentine wear of primary and permanent human and bovine teeth because of erosion/abrasion and evaluate if bovine dentine is an appropriate substitute for human dentine in further erosion/abrasions tests. Dentine samples from deciduous molars and human third molars as well as from calves' and cattle's lower incisors were prepared and baseline surface profiles were r...

Soil erosion is a major threat to global economic and environmental sustainability. This study evaluated long-term effects of conservation tillage with poultry litter application on soil erosion estimates in cotton (Gossypium hirsutum L.) plots using RUSLE 2.0 computer model. Treatments consisting of no-till, mulch-till, and conventional tillage systems, winter rye (Secale cereale L.) cover cro...

Using real-time x-ray scattering to measure the surface morphology of Au(111) during sputter erosion with 500 eV Ar ions, we observe three distinct regimes: three-dimensional rough erosion at 20–60 ±C, quasi-layer-by-layer removal at 120–220 ±C, and step retraction above 270 ±C. Sputtering at 20–60 ±C leads to pattern formation with a characteristic spacing between features. The average separat...

The ability of plasma-facing materials (PFM) in fusion reactor to withstand subsequent erosion as well as deuterium and tritium accumulation depends on material properties, which will continuously be changed during reactor operation. Variation in plasma parameters, using various materials for coating of reactor walls, e.g., Be for the first wall and W and C for the divertor area, and the presen...