A scatterometer is extended and allows us to perform ellipsometric measurements on scattered light in each direction of space. Experimental data are given for single thin-film layers and optical coatings and reveal unexpected results. The phenomena are investigated by means of the electromagnetic theories of surface and bulk scattering that emphasize the role of partial correlation and localize...

Ellipsometry is a powerful tool to gain the optical properties of materials though measuring the change of polarization state of the probe light after interaction with the sample. It offers a sensitive, nondestructive and comprehensive way to accurately determine film thickness and optical constants of extensive materials, such as metals, ceramics, glasses, semiconductors, and its compounds and...