نتایج جستجو برای: effective electron

تعداد نتایج: 976318  

Journal: :Advanced Materials Interfaces 2023

As the crucial dimension (CD) of logic circuits continues to shrink, photoresist metrics, including resolution, line edge roughness, and sensitivity, are faced with significant challenges. Photoresists indispensable in integrated circuit manufacturing industry, specifically achieving smaller critical dimensions. In this study, effects two categories photosensitive compounds on lithography perfo...

Journal: :Monthly Notices of the Royal Astronomical Society 1977

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