The mechanism of anion-catalyzed C–H silylation by R3SiCF3 reagents has been investigated using homogeneous TBAT-initiation, in situ and stopped-flow 19F NMR spectroscopy 2H-KIE, LFER, deuterium-labeled crossover, structure-selectivity quantitation (TMSCF3/TESCF3), carbene trapping, DFT-calculations. Analysis the kinetics reactions 1,3-difluorobenzenes (2), generation ArSiMe3 Me3SiF as a functi...