Tungsten and titanium oxide (WO3/Ti) nanowires (NWs) were grown by thermal oxidation of a tungsten and titanium alloy (WTi) metallic layer deposited on 2 × 2 mm2 alumina substrates by DC magnetron sputtering. Thermal oxidation was carried out in a custom evaporator chamber. Several parameters were controlled to achieve the optimal growth conditions. Morphological and structural analysis were pe...

Composite titanium carbonitride (TiCN) thin films deposited on AZ31 by DC/RF magnetron sputtering were vacuum annealed at different temperatures. Vacuum annealing yields the following on the structure and properties of the films: the grain grows and the roughness increases with an increase of annealing temperature, the structure changes from polycrystalline to single crystal, and the distributi...

Ultra thin platinum films were grown by dc magnetron sputtering on thermally oxidized Si (100) substrates. The electrical resistance of the films was monitored in-situ during growth. The coalescence thickness was determined for various growth temperatures and found to increase from 1.3 nm for films grown at room temperature to 1.8 nm for films grown at 250◦C, while a continuous film was formed ...

A cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. The substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. The Al/ Cu multilayer film was deposited on the glass substrate at the following conditions: Working g...

In this study, we demonstrate the advantages of two advanced sputtering techniques for preparation a thin-film conductometric gas sensor. We combined tungsten oxide (WO3) thin films with other materials to achieve enhanced sensorial behavior towards hydrogen. Thin WO3 were prepared using DC and HiPIMS technique, which allowed us tune phase composition crystallinity by changing deposition parame...